Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Modified process flow for the creation of SD-BAW Z-axis gyroscopes in

PDF) Multi-Coefficient Eigenmode Operation – Breaking Through 10°/hr Open-Loop Bias Instability in Wideband Aluminum Nitride Piezoelectric BAW Gyroscopes

Variation of the scale factor and offset of an SD-BAW gyroscope as

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PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

PDF] 100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process

Eigenmode operation of piezoelectric resonant gyroscopes

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Figure 3 from Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes

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Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes

Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices. - Abstract - Europe PMC

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