Low-k dielectric materials - ScienceDirect
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PDF) Organofluorosilicate glass: A dense low-k dielectric with
Young's modulus and hardness of porous dielectric materials
Materials chemistry for low-k materials - ScienceDirect
High-k materials
Materials chemistry for low-k materials - ScienceDirect
PDF) Low-K dielectric materials
Porous Low-Dielectric-Constant Material for Semiconductor
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