High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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Figure 1 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio

Wafer-scale 3D shaping of high aspect ratio structures by multistep plasma etching and corner lithography

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Deep reactive ion etching - ScienceDirect

Figure 2 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio

High aspect ratio silicon ring-shape micropillars fabricated by

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