Nanofabrication through forming: Techniques and mechanics

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Exploiting the plastic deformability of materials to manufacture components is widely applied in automobile, aerospace, consumer electronics, medical equipment, and other fields. With the development trend of device miniaturization, nanofabrication techniques plays a central role in the manufacturing industry. In recent years, extensive research and remarkable progress have been made in developing micro-/nanoforming techniques, and in-depth understanding of the underlying deformation behavior. This paper will review the latest research progress of micro-/nanoforming techniques, focusing on the deformation mechanism and size effect in the micro-/nanoforming of different material classes such as polymers, amorphous alloys/bulk metallic glass, and crystalline metals. Finally, the technical challenges and key mechanical problems of micro-/nanoforming of crystalline metals are prospected.

PDF) Nanofabrication Techniques: Challenges and Future Prospects

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